Explain Ion saturation current and current-voltage characteristics curve measuring equipment

 

Explain Ion saturation current and current-voltage characteristics curve measuring equipment?

 

Solution

Figure 1

 

Here, the Langmuir probe of the DC power supply was used. The biasing voltage was charged from -70v to +70v. The Langmuir probe was compensated with an LC parallel filter circuit to avoid the influence of the RF plasma potential fluctuations on the probe measurements were carefully performed so as to minimize the disturbance to the stable plasma.